Steven Tianxiao Lee

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method for measuring temperature of film in reaction chamber
- Patent number 9,696,209
- Issue date Jul 4, 2017
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Lu Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MEASURING TEMPERATURE OF FILM IN REACTION CHAMBER
- Publication number 20150025832
- Publication date Jan 22, 2015
- Advanced Micro-Fabrication Equipment Inc., Shanghai
- Lu Chen
- G01 - MEASURING TESTING