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Steven W. Johnston
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Portland, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Forming a copper diffusion barrier
Patent number
8,227,335
Issue date
Jul 24, 2012
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a bottomless via
Patent number
7,694,413
Issue date
Apr 13, 2010
Intel Corporation
Steven W. Johnston
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposited tantalum containing adhesion layer
Patent number
7,605,469
Issue date
Oct 20, 2009
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposited tantalum containing adhesion layer
Patent number
7,601,637
Issue date
Oct 13, 2009
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Amine-free deposition of metal-nitride films
Patent number
7,550,385
Issue date
Jun 23, 2009
Intel Corporation
Adrien R. Lavoie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Noble metal barrier and seed layer for semiconductors
Patent number
7,459,392
Issue date
Dec 2, 2008
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alloyed underlayer for microelectronic interconnects
Patent number
7,435,679
Issue date
Oct 14, 2008
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post polish anneal of atomic layer deposition barrier layers
Patent number
7,335,587
Issue date
Feb 26, 2008
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming a copper diffusion barrier
Patent number
7,279,423
Issue date
Oct 9, 2007
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low k ILD layer with a hydrophilic portion
Patent number
7,241,706
Issue date
Jul 10, 2007
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organometallic precursors for the chemical phase deposition of meta...
Patent number
7,220,671
Issue date
May 22, 2007
Intel Corporation
Harsono Simka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Densifying a relatively porous material
Patent number
7,071,126
Issue date
Jul 4, 2006
Intel Corporation
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating a conductive material on a dielectric material
Patent number
6,867,473
Issue date
Mar 15, 2005
Intel Corporation
Michael D. Goodner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plating a conductive material on a dielectric material
Patent number
6,682,989
Issue date
Jan 27, 2004
Intel Corporation
Michael D. Goodner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATING A BOTTOMLESS VIA TO PROMOTE ADSORPTION OF ANTISUPPRESSO...
Publication number
20100164108
Publication date
Jul 1, 2010
Steven W. Johnston
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Atomic layer deposited tantalum containing adhesion layer
Publication number
20090155998
Publication date
Jun 18, 2009
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrating a bottomless via to promote adsorption of antisuppresso...
Publication number
20080000678
Publication date
Jan 3, 2008
Steven W. Johnston
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Forming a copper diffusion barrier
Publication number
20070298608
Publication date
Dec 27, 2007
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Amine-free deposition of metal-nitride films
Publication number
20070075427
Publication date
Apr 5, 2007
Adrien R. Lavoie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post polish anneal of atomic layer deposition barrier layers
Publication number
20070004230
Publication date
Jan 4, 2007
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for adhesion and deposition of metal films which provide a b...
Publication number
20060286800
Publication date
Dec 21, 2006
Juan E. Dominguez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Organometallic precursors for the chemical phase deposition of meta...
Publication number
20060223300
Publication date
Oct 5, 2006
Harsono Simka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Nobel metal barrier and seed layer for semiconductors
Publication number
20060220249
Publication date
Oct 5, 2006
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Uniformity in batch spray processing using independent cassette rot...
Publication number
20060131276
Publication date
Jun 22, 2006
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alloyed underlayer for microelectronic interconnects
Publication number
20060118968
Publication date
Jun 8, 2006
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Forming a combined copper diffusion barrier and seed layer
Publication number
20060063379
Publication date
Mar 23, 2006
Thomas S. Dory
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low k ILD layer with a hydrophilic portion
Publication number
20060057838
Publication date
Mar 16, 2006
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic layer deposited tantalum containing adhesion layer
Publication number
20060003581
Publication date
Jan 5, 2006
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Densifying a relatively porous material
Publication number
20050181631
Publication date
Aug 18, 2005
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Densifying a relatively porous material
Publication number
20040229452
Publication date
Nov 18, 2004
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plating a conductive material on a dielectric material
Publication number
20040104483
Publication date
Jun 3, 2004
Michael D. Goodner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Forming a copper diffusion barrier
Publication number
20040084773
Publication date
May 6, 2004
Steven W. Johnston
H01 - BASIC ELECTRIC ELEMENTS