Stewart A. Robertson

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Shrewsbury, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Compositions and processes for immersion lithography
- Patent number 8,911,927
- Issue date Dec 16, 2014
- Rohm and Haas Electronic Materials LLC
- Michael K. Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compositions and processes for immersion lithography
- Patent number 7,781,141
- Issue date Aug 24, 2010
- Rohm and Haas Electronic Materials LLC
- Michael K. Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND PROCESSES FOR IMMERSION LITHOGRAPHY
- Publication number 20110123937
- Publication date May 26, 2011
- Rohm and Haas Electronic Materials L.L.C.
- Michael K. GALLAGHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compositions and processes for immersion lithography
- Publication number 20060105272
- Publication date May 18, 2006
- Rohm and Haas Electronic Materials L.L.C.
- Michael K. Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY