Stewart A. Robertson

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Cedar Park, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for focus-sensitive metrology targets
- Patent number 10,209,627
- Issue date Feb 19, 2019
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin coating modeling
- Patent number 8,428,762
- Issue date Apr 23, 2013
- KLA-Tencor Corporation
- John S. Graves
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Focus-Sensitive Metrology Targets
- Publication number 20180196358
- Publication date Jul 12, 2018
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spin Coating Modeling
- Publication number 20110054664
- Publication date Mar 3, 2011
- KLA-Tencor Corporation
- John S. Graves
- G06 - COMPUTING CALCULATING COUNTING