Stig Bieling

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Pupil facet mirror, optical system and illumination optics for a pr...
- Patent number 11,169,445
- Issue date Nov 9, 2021
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical device for projection lithography
- Patent number 11,003,086
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical element for projection lithography
- Patent number 10,948,828
- Issue date Mar 16, 2021
- Carl Zeiss SMT GmbH
- Stig Bieling
- G02 - OPTICS
Information Patent Grant
Facet mirror
- Patent number 10,599,041
- Issue date Mar 24, 2020
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for illuminating an object field of a projection exposure sy...
- Patent number 10,409,167
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
Microlithographic illumination unit
- Patent number 10,394,129
- Issue date Aug 27, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus and method for measuring an imaging a...
- Patent number 10,324,380
- Issue date Jun 18, 2019
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflecting coating with optimized thickness
- Patent number 10,146,136
- Issue date Dec 4, 2018
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
Illumination optical assembly for a projection exposure apparatus
- Patent number 10,133,182
- Issue date Nov 20, 2018
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for EUV projection lithography
- Patent number 10,018,917
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for EUV projection lithography
- Patent number 9,983,484
- Issue date May 29, 2018
- Carl Zeiss SMT GmbH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation collector, radiation source and lithographic apparatus
- Patent number 9,983,482
- Issue date May 29, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,983,483
- Issue date May 29, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror array
- Patent number 9,874,819
- Issue date Jan 23, 2018
- Carl Zeiss SMT GmbH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for a projection exposure apparatus for EUV projection lit...
- Patent number 9,791,784
- Issue date Oct 17, 2017
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,477,157
- Issue date Oct 25, 2016
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,046,786
- Issue date Jun 2, 2015
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for EUV microlithography
- Patent number 8,395,754
- Issue date Mar 12, 2013
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
Method and apparatus for setting an illumination optical unit
- Patent number 8,345,219
- Issue date Jan 1, 2013
- Carl Zeiss SMT GmbH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 8,294,877
- Issue date Oct 23, 2012
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20220342314
- Publication date Oct 27, 2022
- Carl Zeiss SMT GMBH
- Joachim Kalden
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL DEVICE FOR PROJECTION LITHOGRAPHY
- Publication number 20200341384
- Publication date Oct 29, 2020
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL ELEMENT FOR PROJECTION LITHOGRAPHY
- Publication number 20200341385
- Publication date Oct 29, 2020
- Carl Zeiss SMT GMBH
- Stig Bieling
- G02 - OPTICS
Information Patent Application
PUPIL FACET MIRROR, OPTICAL SYSTEM AND ILLUMINATION OPTICS FOR A PR...
- Publication number 20200272058
- Publication date Aug 27, 2020
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC ILLUMINATION UNIT
- Publication number 20190113849
- Publication date Apr 18, 2019
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING AN IMAGING A...
- Publication number 20180196350
- Publication date Jul 12, 2018
- Carl Zeiss SMT GMBH
- Stig BIELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20170248851
- Publication date Aug 31, 2017
- Carl Zeiss SMT GMBH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL ASSEMBLY FOR A PROJECTION EXPOSURE APPARATUS
- Publication number 20170160643
- Publication date Jun 8, 2017
- Carl Zeiss SMT GMBH
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20170160642
- Publication date Jun 8, 2017
- Carl Zeiss SMT GMBH
- Stig Bieling
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20170038691
- Publication date Feb 9, 2017
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SY...
- Publication number 20160342094
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR ARRAY
- Publication number 20160342095
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Stig Bieling
- G02 - OPTICS
Information Patent Application
REFLECTING COATING WITH OPTIMIZED THICKNESS
- Publication number 20160048083
- Publication date Feb 18, 2016
- Carl Zeiss SMT GMBH
- Martin ENDRES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Collector, Radiation Source and Lithographic Apparatus
- Publication number 20160026091
- Publication date Jan 28, 2016
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150234291
- Publication date Aug 20, 2015
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ASSEMBLY FOR A PROJECTION EXPOSURE APPARATUS FOR EUV PROJECTION LIT...
- Publication number 20150062549
- Publication date Mar 5, 2015
- Carl Zeiss SMT GMBH
- Michael Patra
- G02 - OPTICS
Information Patent Application
FACET MIRROR
- Publication number 20150049321
- Publication date Feb 19, 2015
- Carl Zeiss SMT GMBH
- Stig Bieling
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20130057844
- Publication date Mar 7, 2013
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR SETTING AN ILLUMINATION OPTICAL UNIT
- Publication number 20120300195
- Publication date Nov 29, 2012
- Carl Zeiss SMT GMBH
- Joachim Hartjes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
- Publication number 20120206704
- Publication date Aug 16, 2012
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
- Publication number 20110141445
- Publication date Jun 16, 2011
- Carl Zeiss SMT GMBH
- Martin Endres
- G02 - OPTICS

Stig Bieling

Person

Patents Grantslast 30 patents

Pupil facet mirror, optical system and illumination optics for a pr...

Illumination optical device for projection lithography

Illumination optical element for projection lithography

Facet mirror

Method for illuminating an object field of a projection exposure sy...

Microlithographic illumination unit

Projection exposure apparatus and method for measuring an imaging a...

Reflecting coating with optimized thickness

Illumination optical assembly for a projection exposure apparatus

Illumination optical unit for EUV projection lithography

Illumination optical unit for EUV projection lithography

Radiation collector, radiation source and lithographic apparatus

Illumination system of a microlithographic projection exposure appa...

Mirror array

Assembly for a projection exposure apparatus for EUV projection lit...

Illumination system of a microlithographic projection exposure appa...

Illumination system of a microlithographic projection exposure appa...

Illumination optical unit for EUV microlithography

Method and apparatus for setting an illumination optical unit

Illumination optical unit for projection lithography

Patents Applicationslast 30 patents

ILLUMINATION OPTICAL SYSTEM FOR EUV PROJECTION LITHOGRAPHY

ILLUMINATION OPTICAL DEVICE FOR PROJECTION LITHOGRAPHY

ILLUMINATION OPTICAL ELEMENT FOR PROJECTION LITHOGRAPHY

PUPIL FACET MIRROR, OPTICAL SYSTEM AND ILLUMINATION OPTICS FOR A PR...

MICROLITHOGRAPHIC ILLUMINATION UNIT

PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING AN IMAGING A...

ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

ILLUMINATION OPTICAL ASSEMBLY FOR A PROJECTION EXPOSURE APPARATUS

ILLUMINATION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SY...

MIRROR ARRAY

REFLECTING COATING WITH OPTIMIZED THICKNESS

Radiation Collector, Radiation Source and Lithographic Apparatus

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

ASSEMBLY FOR A PROJECTION EXPOSURE APPARATUS FOR EUV PROJECTION LIT...

FACET MIRROR

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

METHOD AND APPARATUS FOR SETTING AN ILLUMINATION OPTICAL UNIT

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY

ILLUMINATION OPTICAL UNIT FOR EUV MICROLITHOGRAPHY