Stijn Boschker

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Pijnacker, NL

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Patents Grantslast 30 patents

Information Patent Grant
Combination of structure and an active damping system, and a lithog...
- Patent number 8,245,824
- Issue date Aug 21, 2012
- ASML Netherlands B.V.
- Hans Butler
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus having an active damping subassembly
- Patent number 8,164,737
- Issue date Apr 24, 2012
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Damping arrangement, active damping system, lithographic apparatus,...
- Patent number 8,059,259
- Issue date Nov 15, 2011
- ASML Netherlands B.V.
- Hans Butler
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Damping Arrangement, Active Damping System, Lithographic Apparatus,...
- Publication number 20090207393
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMBINATION OF STRUCTURE AND AN ACTIVE DAMPING SYSTEM, AND A LITHOG...
- Publication number 20090180092
- Publication date Jul 16, 2009
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS HAVING AN ACTIVE DAMPING SUBASSEMBLY
- Publication number 20090122284
- Publication date May 14, 2009
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY