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Stuart Rounds
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Frederick, MD, US
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last 30 patents
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Patent Grant
Method of photoresist ash residue removal
Patent number
6,734,120
Issue date
May 11, 2004
Axcelis Technologies, Inc.
Ivan Berry
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of stripping photoresist using re-coating material
Patent number
6,406,836
Issue date
Jun 18, 2002
Axcelis Technologies, Inc.
Robert Mohondro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY