Su Ho Cho

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reactor design for large-area VHF plasma processing with improved u...
- Patent number 11,532,464
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Shuran Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exchange and flip chamber design for heterojunction solar cell form...
- Patent number 10,453,728
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Kyung-Tae Kim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Methods and apparatus for uniformly and high-rate depositing low re...
- Patent number 10,047,440
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Shuran Sheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing chamber cleaning end point det...
- Patent number 10,043,641
- Issue date Aug 7, 2018
- Applied Materials, Inc.
- Young-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Active cooling substrate support
- Patent number 8,709,162
- Issue date Apr 29, 2014
- Applied Materials, Inc.
- Samuel Leung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FABRICATING TANDEM SOLAR CELL DEVICES USING DEVICE-LEVEL ENCAPSULATION
- Publication number 20240381675
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Yongkee Chae
Information Patent Application
FABRICATING SOLAR CELL DEVICES TO REDUCE ACTIVE LAYER DAMAGE
- Publication number 20240381753
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Yongkee Chae
Information Patent Application
LARGE-AREA VHF PECVD CHAMBER FOR LOW-DAMAGE AND HIGH-THROUGHPUT PLA...
- Publication number 20210280389
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Shuran SHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND REACTOR DESIGN FOR LARGE-AREA VHF PLASMA PROCESSING WITH...
- Publication number 20190252161
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Shuran SHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...
- Publication number 20180144966
- Publication date May 24, 2018
- Applied Materials, Inc.
- Kyung-Tae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING CHAMBER CLEANING END POINT DET...
- Publication number 20180082827
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Young-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR UNIFORMLY AND HIGH-RATE DEPOSITING LOW RE...
- Publication number 20170069493
- Publication date Mar 9, 2017
- Applied Materials, Inc.
- Shuran SHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON COATINGS FOR SUBSTRATE CARRIERS
- Publication number 20150333213
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Shuran SHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Active cooling substrate support
- Publication number 20070039942
- Publication date Feb 22, 2007
- APPLIED MATERIALS, INC.
- Samuel Leung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Reactor design for large-area VHF plasma processing with improved u...

Exchange and flip chamber design for heterojunction solar cell form...

Methods and apparatus for uniformly and high-rate depositing low re...

Methods and apparatus for processing chamber cleaning end point det...

Active cooling substrate support

Patents Applicationslast 30 patents

FABRICATING TANDEM SOLAR CELL DEVICES USING DEVICE-LEVEL ENCAPSULATION

FABRICATING SOLAR CELL DEVICES TO REDUCE ACTIVE LAYER DAMAGE

LARGE-AREA VHF PECVD CHAMBER FOR LOW-DAMAGE AND HIGH-THROUGHPUT PLA...

METHOD AND REACTOR DESIGN FOR LARGE-AREA VHF PLASMA PROCESSING WITH...

EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...

METHODS AND APPARATUS FOR PROCESSING CHAMBER CLEANING END POINT DET...

METHODS AND APPARATUS FOR UNIFORMLY AND HIGH-RATE DEPOSITING LOW RE...

DIAMOND-LIKE CARBON COATINGS FOR SUBSTRATE CARRIERS

Active cooling substrate support