Su-Ting CHENG

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method of measuring a parameter of a patterning process, metrology...
- Patent number 11,150,563
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Sergei Sokolov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 10,788,757
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Su-Ting Cheng
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...
- Publication number 20200192230
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
- Publication number 20190317413
- Publication date Oct 17, 2019
- ASML NETHERLANDS B.V.
- Su-Ting CHENG
- G01 - MEASURING TESTING