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Subhash Deshmukh
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Vancouver, WA, US
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last 30 patents
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Patent Grant
Methods and apparatus for monitoring a process in a plasma processi...
Patent number
7,323,116
Issue date
Jan 29, 2008
Lam Research Corporation
Timothy J. Guiney
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Treatment for corrosion in substrate processing
Patent number
7,084,070
Issue date
Aug 1, 2006
Lam Research Corporation
Sangheon Lee
H01 - BASIC ELECTRIC ELEMENTS