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Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068097
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSPITION FURNACE FOR DEPOSITING FILMS
- Publication number 20230002889
- Publication date Jan 5, 2023
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...