Subramoney V. Iyer

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Process for forming a semiconductor device
- Patent number 6,146,250
- Issue date Nov 14, 2000
- Motorola, Inc.
- Rajan Nagabushnam
- B24 - GRINDING POLISHING
Information Patent Grant
Low selectivity chemical mechanical polishing (CMP) process for use...
- Patent number 6,045,435
- Issue date Apr 4, 2000
- Motorola, Inc.
- Rajeev Bajaj
- B24 - GRINDING POLISHING
Information Patent Grant
Process for forming a semiconductor device
- Patent number 6,012,970
- Issue date Jan 11, 2000
- Motorola, Inc.
- Rajan Nagabushnam
- B24 - GRINDING POLISHING
Information Patent Grant
Method for using a conductive tungsten nitride etch stop layer to f...
- Patent number 6,001,726
- Issue date Dec 14, 1999
- Motorola, Inc.
- Rajan Nagabushnam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit having a dummy structure and method of making
- Patent number 5,885,856
- Issue date Mar 23, 1999
- Motorola, Inc.
- Percy V. Gilbert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for polishing a semiconductor wafer using dynamic control
- Patent number 5,882,243
- Issue date Mar 16, 1999
- Motorola, Inc.
- Sanjit Das
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-step planarization process using polishing at two different p...
- Patent number 5,665,202
- Issue date Sep 9, 1997
- Motorola, Inc.
- Chitra K. Subramanian
- H01 - BASIC ELECTRIC ELEMENTS