Suchitra Subrahmanyan

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Reactive preclean prior to metallization for sub-quarter micron app...
- Patent number 6,905,965
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Suchitra Subrahmanyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive preclean prior to metallization for sub-quarter micron app...
- Patent number 6,693,030
- Issue date Feb 17, 2004
- Applied Materials, Inc.
- Suchitra Subrahmanyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of selective formation of a barrier layer for a contact leve...
- Patent number 6,518,176
- Issue date Feb 11, 2003
- Ted Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ capped aluminum plug (CAP) process using selective CVD AL f...
- Patent number 6,110,828
- Issue date Aug 29, 2000
- Applied Materials, Inc.
- Ted Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive preclean prior to metallization for sub-quarter micron app...
- Patent number 6,107,192
- Issue date Aug 22, 2000
- Applied Materials, Inc.
- Suchitra Subrahmanyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Reactive preclean prior to metallization for sub-quarter micron app...
- Publication number 20040248404
- Publication date Dec 9, 2004
- APPLIED MATERIALS, INC.
- Suchitra Subrahmanyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for detecting the thickness of copper oxide
- Publication number 20020186381
- Publication date Dec 12, 2002
- Suchitra Subrahmanyan
- G01 - MEASURING TESTING
Information Patent Application
CONTACT LEVEL VIA AND METHOD OF SELECTIVE FORMATION OF A BARRIER LA...
- Publication number 20010001503
- Publication date May 24, 2001
- TED GUO
- H01 - BASIC ELECTRIC ELEMENTS