Sudha Rathi

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Treatments for controlling deposition defects
- Patent number 11,894,228
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of minimizing wafer backside damage in semiconductor wafer...
- Patent number 10,971,390
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of dry stripping boron-carbon films
- Patent number 10,510,518
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 10,373,822
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 9,837,265
- Issue date Dec 5, 2017
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of removing a material layer from a substrate using water v...
- Patent number 9,653,327
- Issue date May 16, 2017
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow profile modulated control of overlay in plasma CVD films
- Patent number 9,390,910
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for substrate clamping in a plasma chamber
- Patent number 9,337,072
- Issue date May 10, 2016
- Applied Materials, Inc.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of dry stripping boron-carbon films
- Patent number 9,299,581
- Issue date Mar 29, 2016
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
- Patent number 8,993,454
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
- Patent number 8,536,065
- Issue date Sep 17, 2013
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planarizing etch hardmask to increase pattern density and aspect ratio
- Patent number 8,513,129
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Martin Jay Seamons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high selectivity ashable hard mask film
- Patent number 8,361,906
- Issue date Jan 29, 2013
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
- Patent number 8,282,734
- Issue date Oct 9, 2012
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Maintenance of photoresist activity on the surface of dielectric ar...
- Patent number 8,211,626
- Issue date Jul 3, 2012
- Applied Materials, Inc.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device having silicon carbide and conductive pathway...
- Patent number 8,183,150
- Issue date May 22, 2012
- Applied Materials, Inc.
- Judy H. Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded ARC for high NA and immersion lithography
- Patent number 8,125,034
- Issue date Feb 28, 2012
- Applied Materials, Inc.
- Wendy H. Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for depositing conformal amorphous carbon film by plasma-enh...
- Patent number 8,105,465
- Issue date Jan 31, 2012
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduction in photoresist footing undercut during development of fea...
- Patent number 8,088,563
- Issue date Jan 3, 2012
- Applied Materials, Inc.
- Sang H. Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for depositing an amorphous carbon film with improved densit...
- Patent number 7,867,578
- Issue date Jan 11, 2011
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded ARC for high NA and immersion lithography
- Patent number 7,776,516
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Wendy H. Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing an amorphous carbon film for etch hardmask app...
- Patent number 7,638,440
- Issue date Dec 29, 2009
- Applied Materials, Inc.
- Yuxiang May Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
- Patent number 7,514,125
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid precursors for the CVD deposition of amorphous carbon films
- Patent number 7,407,893
- Issue date Aug 5, 2008
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 7,105,460
- Issue date Sep 12, 2006
- Applied Materials
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for the reduction and elimination of particulate contaminat...
- Patent number 7,094,442
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment for copper oxide reduction
- Patent number 6,946,401
- Issue date Sep 20, 2005
- Applied Materials, Inc.
- Judy H. Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
- Patent number 6,927,178
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Bok Hoen Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitrogen-free antireflective coating for use with photolithographic...
- Patent number 6,853,043
- Issue date Feb 8, 2005
- Applied Materials, Inc.
- Wendy H. Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment for copper oxide reduction
- Patent number 6,734,102
- Issue date May 11, 2004
- Applied Materials Inc.
- Sudha Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TREATMENTS FOR CONTROLLING DEPOSITION DEFECTS
- Publication number 20230061249
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED CARBON ADHESION
- Publication number 20220293416
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Sudha S. Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING MATERIAL FOR PROCESSING CHAMBERS
- Publication number 20200058539
- Publication date Feb 20, 2020
- Applied Materials, Inc.
- Sudha RATHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MINIMIZING WAFER BACKSIDE DAMAGE IN SEMICONDUCTOR WAFER...
- Publication number 20190393072
- Publication date Dec 26, 2019
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20180096843
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20160307752
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20160133443
- Publication date May 12, 2016
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS
- Publication number 20160099147
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20160064209
- Publication date Mar 3, 2016
- Applied Materials, Inc.
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20140216498
- Publication date Aug 7, 2014
- Kwangduk Douglas LEE
- B08 - CLEANING
Information Patent Application
ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...
- Publication number 20140017897
- Publication date Jan 16, 2014
- Applied Materials, Inc.
- Martin Jay SEAMONS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPENSATING CONCENTRATION UNCERTAINITY
- Publication number 20130284090
- Publication date Oct 31, 2013
- Ganesh BALASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REMOVING A MATERIAL LAYER FROM A SUBSTRATE USING WATER V...
- Publication number 20120285481
- Publication date Nov 15, 2012
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF DRY STRIPPING BORON-CARBON FILMS
- Publication number 20120285492
- Publication date Nov 15, 2012
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...
- Publication number 20120204795
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20120208373
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- DEENESH PADHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...
- Publication number 20120080779
- Publication date Apr 5, 2012
- Applied Materials, Inc.
- Martin Jay SEAMONS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANARIZING ETCH HARDMASK TO INCREASE PATTERN DENSITY AND ASPECT RATIO
- Publication number 20110291243
- Publication date Dec 1, 2011
- Applied Materials, Inc.
- Martin Jay Seamons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA HIGH SELECTIVITY ASHABLE HARD MASK FILM
- Publication number 20110287633
- Publication date Nov 24, 2011
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD MULTI-STEP PROCESSING WITH CONTINUOUS PLASMA
- Publication number 20110151142
- Publication date Jun 23, 2011
- Applied Materials, Inc.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20110104400
- Publication date May 5, 2011
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
- Publication number 20110090613
- Publication date Apr 21, 2011
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADED ARC FOR HIGH NA AND IMMERSION LITHOGRAPHY
- Publication number 20100239979
- Publication date Sep 23, 2010
- Wendy H. Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enh...
- Publication number 20100093187
- Publication date Apr 15, 2010
- Applied Materials, Inc.
- Kwangduk Douglas Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELIMINATION OF PHOTORESIST MATERIAL COLLAPSE AND POISONING IN 45-NM...
- Publication number 20090197086
- Publication date Aug 6, 2009
- Sudha Rathi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE HAVING SILICON CARBIDE AND CONDUCTIVE PATHWAY...
- Publication number 20090050902
- Publication date Feb 26, 2009
- Judy H. Huang
- B08 - CLEANING
Information Patent Application
METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...
- Publication number 20090044753
- Publication date Feb 19, 2009
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20080153311
- Publication date Jun 26, 2008
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
- Publication number 20080084650
- Publication date Apr 10, 2008
- APPLIED MATERIALS, INC.
- Ganesh Balasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Graded ARC for high na and immersion lithography
- Publication number 20080020319
- Publication date Jan 24, 2008
- APPLIED MATERIALS, INC.
- Wendy H. Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Sudha Rathi

Person

Patents Grantslast 30 patents

Treatments for controlling deposition defects

Methods of minimizing wafer backside damage in semiconductor wafer...

Methods of dry stripping boron-carbon films

Gas flow profile modulated control of overlay in plasma CVD films

Gas flow profile modulated control of overlay in plasma CVD films

Methods of removing a material layer from a substrate using water v...

Gas flow profile modulated control of overlay in plasma CVD films

Apparatus and method for substrate clamping in a plasma chamber

Methods of dry stripping boron-carbon films

Ultra high selectivity doped amorphous carbon strippable hardmask d...

Ultra high selectivity doped amorphous carbon strippable hardmask d...

Planarizing etch hardmask to increase pattern density and aspect ratio

Ultra high selectivity ashable hard mask film

Methods to improve the in-film defectivity of PECVD amorphous carbo...

Maintenance of photoresist activity on the surface of dielectric ar...

Semiconductor device having silicon carbide and conductive pathway...

Graded ARC for high NA and immersion lithography

Method for depositing conformal amorphous carbon film by plasma-enh...

Reduction in photoresist footing undercut during development of fea...

Method for depositing an amorphous carbon film with improved densit...

Graded ARC for high NA and immersion lithography

Method of depositing an amorphous carbon film for etch hardmask app...

Methods to improve the in-film defectivity of PECVD amorphous carbo...

Liquid precursors for the CVD deposition of amorphous carbon films

Nitrogen-free dielectric anti-reflective coating and hardmask

Methods for the reduction and elimination of particulate contaminat...

Plasma treatment for copper oxide reduction

Nitrogen-free dielectric anti-reflective coating and hardmask

Nitrogen-free antireflective coating for use with photolithographic...

Plasma treatment for copper oxide reduction

Patents Applicationslast 30 patents

TREATMENTS FOR CONTROLLING DEPOSITION DEFECTS

SYSTEMS AND METHODS FOR IMPROVED CARBON ADHESION

COATING MATERIAL FOR PROCESSING CHAMBERS

METHODS OF MINIMIZING WAFER BACKSIDE DAMAGE IN SEMICONDUCTOR WAFER...

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

METHODS OF DRY STRIPPING BORON-CARBON FILMS

GAS FLOW PROFILE MODULATED CONTROL OF OVERLAY IN PLASMA CVD FILMS

METHODS OF DRY STRIPPING BORON-CARBON FILMS

METHODS OF DRY STRIPPING BORON-CARBON FILMS

ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...

COMPENSATING CONCENTRATION UNCERTAINITY

METHODS OF REMOVING A MATERIAL LAYER FROM A SUBSTRATE USING WATER V...

METHODS OF DRY STRIPPING BORON-CARBON FILMS

METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...

PLANARIZING ETCH HARDMASK TO INCREASE PATTERN DENSITY AND ASPECT RATIO

ULTRA HIGH SELECTIVITY ASHABLE HARD MASK FILM

PECVD MULTI-STEP PROCESSING WITH CONTINUOUS PLASMA

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER

GRADED ARC FOR HIGH NA AND IMMERSION LITHOGRAPHY

Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enh...

ELIMINATION OF PHOTORESIST MATERIAL COLLAPSE AND POISONING IN 45-NM...

SEMICONDUCTOR DEVICE HAVING SILICON CARBIDE AND CONDUCTIVE PATHWAY...

METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER

Graded ARC for high na and immersion lithography