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Method of preparing zinc oxide film
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Patent number 4,410,408
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Issue date Oct 18, 1983
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Murata Manufacturing Company, Ltd.
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Suehiro Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 4,318,796
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Issue date Mar 9, 1982
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Murata Manufacturing Co., Ltd.
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Hiroshi Nishiyama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Magnetron sputtering apparatus
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Patent number 4,309,266
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Issue date Jan 5, 1982
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Murata Manufacturing Co., Ltd.
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Takeshi Nakamura
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H01 - BASIC ELECTRIC ELEMENTS
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Sputtering apparatus
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Patent number 4,290,876
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Issue date Sep 22, 1981
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Murata Manufacturing Co., Ltd.
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Hiroshi Nishiyama
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR