Suguen Lee

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,944
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Suguen Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,769,661
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304452
- Publication date Sep 12, 2024
- Tokyo Electron Limited
- Tsunemoto OGATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID-TREATMENT DEVICE
- Publication number 20240192111
- Publication date Jun 13, 2024
- Tokyo Electron Limited
- Hiroshi MARUMOTO
- G01 - MEASURING TESTING
Information Patent Application
ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...
- Publication number 20240096658
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096657
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
- Publication number 20240096656
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210166957
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Suguen Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381245
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi Takeguchi
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID-TREATMENT DEVICE

ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL...

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS