Suguru ENOKIDA

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Holding pad for carrying substrate
- Patent number D1012311
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Tatsuhiko Tsujihashi
- D24 - Medical and laboratory equipment
Information Patent Grant
Holding pad for carrying substrate
- Patent number D1011550
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Tatsuhiko Tsujihashi
- D24 - Medical and laboratory equipment
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,869,789
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,254
- Issue date May 30, 2023
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 11,476,136
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,211,278
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment solution supply apparatus and treatment solution supply m...
- Patent number 11,099,480
- Issue date Aug 24, 2021
- Tokyo Electron Limited
- Takahiro Ookubo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 10,504,757
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,905
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,904
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing system, and me...
- Patent number 9,773,690
- Issue date Sep 26, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method, and storage medium
- Patent number 9,460,947
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,460,942
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method
- Patent number 9,417,529
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal processing apparatus for thermal processing substrate and p...
- Patent number 9,299,599
- Issue date Mar 29, 2016
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method, and a non-tr...
- Patent number 9,287,145
- Issue date Mar 15, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method and non-trans...
- Patent number 9,082,800
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Suguru Enokida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device, inspection method and non-transitory storage med...
- Patent number 9,030,656
- Issue date May 12, 2015
- Tokyo Electron Limited
- Hideki Kajiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method
- Patent number 8,985,880
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,985,929
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Suguru Enokida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing apparatus and method
- Patent number 8,888,387
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and method, and storage medium
- Patent number 8,817,225
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder positioning method and substrate processing system
- Patent number 8,755,935
- Issue date Jun 17, 2014
- Tokyo Electron Limited
- Yuichi Douki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 8,740,481
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device
- Patent number 8,720,873
- Issue date May 13, 2014
- Tokyo Electron Limited
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 8,707,805
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Coating and developing apparatus
- Patent number 8,534,936
- Issue date Sep 17, 2013
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for supporting a substrate
- Patent number 8,528,889
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Seiji Nakano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,506,186
- Issue date Aug 13, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 8,480,319
- Issue date Jul 9, 2013
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240079256
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20230017389
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Tatsuhiko TSUJIHASHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220319876
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165597
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220165596
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210296119
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20200126823
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Akihiro TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20200066559
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS AND TREATMENT SOLUTION SUPPLY M...
- Publication number 20190332014
- Publication date Oct 31, 2019
- TOKYO ELECTRON LIMITED
- Takahiro OOKUBO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20170170040
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372346
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372345
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...
- Publication number 20160172225
- Publication date Jun 16, 2016
- Tokyo Electron Limited
- Katsuhiro MORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20150219994
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20140327890
- Publication date Nov 6, 2014
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus for thermal processing substrate and p...
- Publication number 20140234991
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20130329199
- Publication date Dec 12, 2013
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20130166064
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20130112224
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...
- Publication number 20130112223
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130078059
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...
- Publication number 20130078061
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Suguru ENOKIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE
- Publication number 20120235335
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20120224945
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Yuichi DOUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...
- Publication number 20120148378
- Publication date Jun 14, 2012
- TOKYO ELECTRON LIMITED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE, INSPECTION METHOD AND NON-TRANSITORY STORAGE MED...
- Publication number 20120099951
- Publication date Apr 26, 2012
- TOKYO ELECTRON LIMITED
- Hideki Kajiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120063765
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20120057861
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20120057862
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Shinichi HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM
- Publication number 20120015307
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Suguru ENOKIDA

Person

Patents Grantslast 30 patents

Holding pad for carrying substrate

Holding pad for carrying substrate

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method of adjusting substrate pr...

Substrate processing apparatus and substrate processing method

Treatment solution supply apparatus and treatment solution supply m...

Substrate processing apparatus and method of adjusting substrate pr...

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method and computer...

Substrate processing apparatus, substrate processing system, and me...

Coating and developing apparatus and method, and storage medium

Substrate treatment system, substrate transfer method and computer...

Coating and developing apparatus and method

Thermal processing apparatus for thermal processing substrate and p...

Substrate treatment system, substrate transfer method, and a non-tr...

Substrate treatment system, substrate transfer method and non-trans...

Inspection device, inspection method and non-transitory storage med...

Coating and developing apparatus and method

Substrate processing apparatus, substrate processing method and sto...

Coating and developing apparatus and method

Coating and developing apparatus and method, and storage medium

Substrate holder positioning method and substrate processing system

Coating and developing apparatus

Substrate holding device

Transfer apparatus and transfer method

Coating and developing apparatus

Device and method for supporting a substrate

Coating and developing apparatus, coating and developing method and...

Coating and developing apparatus, coating and developing method and...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

Substrate Processing Apparatus and Substrate Processing Method

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

TREATMENT SOLUTION SUPPLY APPARATUS AND TREATMENT SOLUTION SUPPLY M...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND ME...

COATING AND DEVELOPING APPARATUS AND METHOD

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM

Thermal processing apparatus for thermal processing substrate and p...

COATING AND DEVELOPING APPARATUS

TRANSFER APPARATUS AND TRANSFER METHOD

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND NON-TRANS...

SUBSTRATE HOLDING DEVICE

SUBSTRATE HOLDER POSITIONING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRA...

INSPECTION DEVICE, INSPECTION METHOD AND NON-TRANSITORY STORAGE MED...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS AND METHOD, AND STORAGE MEDIUM