Suguru Hirokawa

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Saijo-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and control method for ion implantation...
- Patent number 9,666,413
- Issue date May 30, 2017
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshito Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling mover device
- Patent number 7,597,531
- Issue date Oct 6, 2009
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mover device and semiconductor manufacturing apparatus and method
- Patent number 7,187,143
- Issue date Mar 6, 2007
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION...
- Publication number 20150364299
- Publication date Dec 17, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshito Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of controlling mover device, cooperative device of mover dev...
- Publication number 20050188924
- Publication date Sep 1, 2005
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mover device and semiconductor manufacturing apparatus and method
- Publication number 20040194565
- Publication date Oct 7, 2004
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS