Suguru MOTEGI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system
- Patent number 11,515,183
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Suguru Motegi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210043480
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210027994
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS