Suguru Ogura

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,500,691
- Issue date Dec 10, 2019
- Ebara Corporation
- Masayoshi Imai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus, polishing pad positioning method, and polishin...
- Patent number 9,919,403
- Issue date Mar 20, 2018
- Ebara Corporation
- Kaoru Hamaura
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus, polishing apparatus having the dressing apparat...
- Patent number 9,855,638
- Issue date Jan 2, 2018
- Ebara Corporation
- Satoshi Nagai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,746,312
- Issue date Jun 8, 2004
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180056470
- Publication date Mar 1, 2018
- EBARA CORPORATION
- Masayoshi IMAI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
POLISHING APPARATUS, METHOD FOR ATTACHING POLISHING PAD, AND METHOD...
- Publication number 20150118944
- Publication date Apr 30, 2015
- EBARA CORPORATION
- Ryuichi Kosuge
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, POLISHING PAD POSITIONING METHOD, AND POLISHIN...
- Publication number 20150004886
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Kaoru HAMAURA
- B24 - GRINDING POLISHING
Information Patent Application
DRESSING APPARATUS, POLISHING APPARATUS HAVING THE DRESSING APPARAT...
- Publication number 20140349552
- Publication date Nov 27, 2014
- Satoshi Nagai
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20020002028
- Publication date Jan 3, 2002
- Hiroomi Torii
- B24 - GRINDING POLISHING