Suguru Sakugawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing-pad laminated structure, polishing-pad positioning instru...
- Patent number 11,642,753
- Issue date May 9, 2023
- Ebara Corporation
- Toshikazu Nomura
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and method of detecting indentation...
- Patent number 11,221,239
- Issue date Jan 11, 2022
- Ebara Corporation
- Zhongxin Wen
- B08 - CLEANING
Information Patent Grant
Leak checking method, and computer-readable storage medium for perf...
- Patent number 10,792,784
- Issue date Oct 6, 2020
- Ebara Corporation
- Suguru Sakugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Head height adjustment device and substrate processing apparatus pr...
- Patent number 10,556,314
- Issue date Feb 11, 2020
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING
Information Patent Grant
Pressure calibration jig and substrate processing apparatus
- Patent number 9,922,852
- Issue date Mar 20, 2018
- Ebara Corporation
- Suguru Sakugawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,662,761
- Issue date May 30, 2017
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Pressure regulator and polishing apparatus having the pressure regu...
- Patent number 9,370,852
- Issue date Jun 21, 2016
- Ebara Corporation
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD
- Publication number 20200269383
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Hozumi YASUDA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING-PAD LAMINATED STRUCTURE, POLISHING-PAD POSITIONING INSTRU...
- Publication number 20200023489
- Publication date Jan 23, 2020
- EBARA CORPORATION
- Toshikazu Nomura
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DETECTING INDENTATION...
- Publication number 20190025096
- Publication date Jan 24, 2019
- EBARA CORPORATION
- Zhongxin Wen
- B08 - CLEANING
Information Patent Application
LEAK CHECKING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR PERF...
- Publication number 20180304434
- Publication date Oct 25, 2018
- EBARA CORPORATION
- Suguru SAKUGAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHER AND POLISHING METHOD
- Publication number 20180236630
- Publication date Aug 23, 2018
- EBARA CORPORATION
- Hozumi YASUDA
- B24 - GRINDING POLISHING
Information Patent Application
HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...
- Publication number 20180001438
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Suguru SAKUGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170352573
- Publication date Dec 7, 2017
- EBARA CORPORATION
- Zhongxin WEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE CALIBRATION JIG AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170092519
- Publication date Mar 30, 2017
- EBARA CORPORATION
- Suguru SAKUGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRESSURE REGULATOR AND POLISHING APPARATUS HAVING THE PRESSURE REGU...
- Publication number 20150224620
- Publication date Aug 13, 2015
- EBARA CORPORATION
- Nobuyuki TAKAHASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20150151401
- Publication date Jun 4, 2015
- EBARA CORPORATION
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING

Suguru Sakugawa

Person

Patents Grantslast 30 patents

Polishing-pad laminated structure, polishing-pad positioning instru...

Substrate processing apparatus and method of detecting indentation...

Leak checking method, and computer-readable storage medium for perf...

Head height adjustment device and substrate processing apparatus pr...

Pressure calibration jig and substrate processing apparatus

Polishing apparatus

Pressure regulator and polishing apparatus having the pressure regu...

Patents Applicationslast 30 patents

SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD

POLISHING-PAD LAMINATED STRUCTURE, POLISHING-PAD POSITIONING INSTRU...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DETECTING INDENTATION...

LEAK CHECKING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM FOR PERF...

SUBSTRATE POLISHER AND POLISHING METHOD

HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...

SUBSTRATE PROCESSING APPARATUS

PRESSURE CALIBRATION JIG AND SUBSTRATE PROCESSING APPARATUS

PRESSURE REGULATOR AND POLISHING APPARATUS HAVING THE PRESSURE REGU...

POLISHING APPARATUS