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Suk Yal Cha
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Spatial deposition of material using short-distance reciprocating m...
Patent number
9,556,514
Issue date
Jan 31, 2017
Veeco ALD Inc.
Jeong Ah Yoon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SPATIAL DEPOSITION OF MATERIAL USING SHORT-DISTANCE RECIPROCATING M...
Publication number
20150218698
Publication date
Aug 6, 2015
Veeco ALD Inc.
Jeong Ah Yoon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...