SUKESH J. PATEL

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SUNNYVALE, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for learning and/or optimizing manufacturing proc...
- Patent number 10,635,993
- Issue date Apr 28, 2020
- Tokyo Electron Limited
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for autonomous tool parameter impact identific...
- Patent number 10,571,900
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Tool failure analysis using space-distorted similarity
- Patent number 10,228,678
- Issue date Mar 12, 2019
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 10,133,265
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for autonomous tool parameter impact identific...
- Patent number 9,746,849
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 9,424,528
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for autonomous identification of particle cont...
- Patent number 9,405,289
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Aaron Archer Waterman
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for learning and/or optimizing manufacturing proc...
- Patent number 9,396,443
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous biologically based learning tool
- Patent number 9,275,335
- Issue date Mar 1, 2016
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Tool performance by linking spectroscopic information with tool ope...
- Patent number 8,954,184
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 8,744,607
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for detection of tool performance degradation and...
- Patent number 8,725,667
- Issue date May 13, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Biologically based chamber matching
- Patent number 8,723,869
- Issue date May 13, 2014
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for self-learning and self-improving a semicon...
- Patent number 8,396,582
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous biologically based learning tool
- Patent number 8,190,543
- Issue date May 29, 2012
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Autonomous adaptive system and method for improving semiconductor m...
- Patent number 8,078,552
- Issue date Dec 13, 2011
- Tokyo Electron Limited
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for poly gate CD control
- Patent number 7,035,696
- Issue date Apr 25, 2006
- Ahsoon Technologies, Inc.
- Ali Sadeghi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for APC solver engine and heuristic
- Patent number 6,834,212
- Issue date Dec 21, 2004
- Blue Control Technologies, Inc.
- Sukesh Patel
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...
- Publication number 20170329318
- Publication date Nov 16, 2017
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Application
TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY
- Publication number 20170023927
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20160334782
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...
- Publication number 20160307116
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR MODELING AND/OR ANALYZING MANUFACTURING PROCE...
- Publication number 20150332167
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...
- Publication number 20150161520
- Publication date Jun 11, 2015
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
- Publication number 20140304196
- Publication date Oct 9, 2014
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20140229409
- Publication date Aug 14, 2014
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...
- Publication number 20140163712
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Aaron Archer Waterman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...
- Publication number 20140135970
- Publication date May 15, 2014
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20130151447
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
- Publication number 20120242667
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL
- Publication number 20120209798
- Publication date Aug 16, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPE...
- Publication number 20120185813
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL
- Publication number 20110131162
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...
- Publication number 20100138026
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND...
- Publication number 20090240366
- Publication date Sep 24, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING
- Publication number 20090228408
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Sanjeev Kaushal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROJECTION APPARATUS WITH DIRECT ATTACHMENT OF EXTERNAL STORAGE MEDIA
- Publication number 20080297667
- Publication date Dec 4, 2008
- CONCEPTTAPISTRY, LLC
- Sukesh Patel
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
CONTROL OF DRY CLEAN PROCESS IN WAFER PROCESSING
- Publication number 20080190446
- Publication date Aug 14, 2008
- Rajiv M. Ranade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for validating and visualizing APC assisted semic...
- Publication number 20050010319
- Publication date Jan 13, 2005
- Sukesh Patel
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS AND METHOD FOR GENERATING A CONFIGURABLE PROGRAM EXPLANAT...
- Publication number 20010017622
- Publication date Aug 30, 2001
- SUKESH J. PATEL
- G06 - COMPUTING CALCULATING COUNTING

SUKESH J. PATEL

Person

Patents Grantslast 30 patents

System and method for learning and/or optimizing manufacturing proc...

Method and apparatus for autonomous tool parameter impact identific...

Tool failure analysis using space-distorted similarity

Method and apparatus for autonomous identification of particle cont...

Method and apparatus for autonomous tool parameter impact identific...

Method and apparatus for self-learning and self-improving a semicon...

Method and apparatus for autonomous identification of particle cont...

System and method for learning and/or optimizing manufacturing proc...

Autonomous biologically based learning tool

Tool performance by linking spectroscopic information with tool ope...

Method and apparatus for self-learning and self-improving a semicon...

Method and system for detection of tool performance degradation and...

Biologically based chamber matching

Method and apparatus for self-learning and self-improving a semicon...

Autonomous biologically based learning tool

Autonomous adaptive system and method for improving semiconductor m...

Method and apparatus for poly gate CD control

Method and apparatus for APC solver engine and heuristic

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...

TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY

METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...

SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...

SYSTEM AND METHOD FOR MODELING AND/OR ANALYZING MANUFACTURING PROCE...

SYSTEM AND METHOD FOR LEARNING AND/OR OPTIMIZING MANUFACTURING PROC...

BIOLOGICALLY BASED CHAMBER MATCHING

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

METHOD AND APPARATUS FOR AUTONOMOUS IDENTIFICATION OF PARTICLE CONT...

METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

BIOLOGICALLY BASED CHAMBER MATCHING

AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL

TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPE...

AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL

METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICON...

METHOD AND SYSTEM FOR DETECTION OF TOOL PERFORMANCE DEGRADATION AND...

AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING

PROJECTION APPARATUS WITH DIRECT ATTACHMENT OF EXTERNAL STORAGE MEDIA

CONTROL OF DRY CLEAN PROCESS IN WAFER PROCESSING

System and method for validating and visualizing APC assisted semic...

APPARATUS AND METHOD FOR GENERATING A CONFIGURABLE PROGRAM EXPLANAT...