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Sputtering apparatus
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Patent number 4,717,462
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Issue date Jan 5, 1988
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Hitachi, Ltd.
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Yoshio Homma
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film deposition
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Patent number 4,599,135
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Issue date Jul 8, 1986
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Hitachi, Ltd.
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Sukeyoshi Tsunekawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 4,394,245
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Issue date Jul 19, 1983
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Hitachi, Ltd.
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Yoshio Homma
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H01 - BASIC ELECTRIC ELEMENTS