Sum Tanaka

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Nirasaki-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply method using a gas supply system
- Patent number 7,854,962
- Issue date Dec 21, 2010
- Tokyo Electron Limited
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Gas supply system and proessing system
- Publication number 20090133755
- Publication date May 28, 2009
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...