SUMANTH BANDA

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chambers and coatings for reducing backside damage
- Patent number 12,094,716
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced localized force in electrostatic chucking
- Patent number 12,033,881
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Sumanth Banda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Condition selectable backside gas
- Patent number 11,666,952
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Stephen D. Prouty
- B08 - CLEANING
Information Patent Grant
Substrate support carrier with improved bond layer protection
- Patent number 11,651,987
- Issue date May 16, 2023
- Applied Materials, Inc.
- Stephen Donald Prouty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support carrier with improved bond layer protection
- Patent number 11,380,572
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Stephen Donald Prouty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 11,130,142
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
- Patent number 10,975,469
- Issue date Apr 13, 2021
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copolymerized high temperature bonding component
- Patent number 10,899,892
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Bond protection around porous plugs
- Patent number 10,847,402
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
High purity aluminum top coat on substrate
- Patent number 10,774,436
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plasma resistant coating of porous body by atomic layer deposition
- Patent number 10,745,805
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 10,625,277
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copolymerized high temperature bonding component
- Patent number 10,570,257
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
High purity aluminum top coat on substrate
- Patent number 9,850,591
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 9,610,591
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and showerhead with enhanced thermal properties...
- Patent number 9,597,734
- Issue date Mar 21, 2017
- Applied Materials, Inc.
- Jennifer Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Enhanced cleaning process of chamber used plasma spray coating with...
- Patent number 9,447,365
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Sumanth Banda
- B08 - CLEANING
Information Patent Grant
Temperature management of aluminium nitride electrostatic chuck
- Patent number 9,358,702
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Sumanth Banda
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Methods and apparatus toward preventing ESC bonding adhesive erosion
- Patent number 8,982,530
- Issue date Mar 17, 2015
- Applied Materials, Inc.
- Xing Lin
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck and showerhead with enhanced thermal properties...
- Patent number 8,916,021
- Issue date Dec 23, 2014
- Applied Materials, Inc.
- Jennifer Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONDITION SELECTABLE BACKSIDE GAS
- Publication number 20230264238
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Stephen D. Prouty
- B08 - CLEANING
Information Patent Application
CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE
- Publication number 20230077578
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Leonard M. Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED LOCALIZED FORCE IN ELECTROSTATIC CHUCKING
- Publication number 20220301913
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Sumanth Banda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CARRIER WITH IMPROVED BOND LAYER PROTECTION
- Publication number 20220172975
- Publication date Jun 2, 2022
- Applied Materials, Inc.
- Stephen Donald PROUTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITION SELECTABLE BACKSIDE GAS
- Publication number 20210276056
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Stephen D. Prouty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CARRIER WITH IMPROVED BOND LAYER PROTECTION
- Publication number 20200373184
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Stephen Donald PROUTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20200238303
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COPOLYMERIZED HIGH TEMPERATURE BONDING COMPONENT
- Publication number 20200140620
- Publication date May 7, 2020
- Applied Materials, Inc.
- Jennifer Y. SUN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
BOND PROTECTION AROUND POROUS PLUGS
- Publication number 20190304827
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
EROSION RESISTANT ATOMIC LAYER DEPOSITION COATINGS
- Publication number 20180337026
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
- Publication number 20180265973
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION
- Publication number 20180265972
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PURITY ALUMINUM TOP COAT ON SUBSTRATE
- Publication number 20180066373
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Jennifer Y. SUN
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20170178863
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- DMITRY LUBOMIRSKY
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COPOLYMERIZED HIGH TEMPERATURE BONDING COMPONENT
- Publication number 20170137575
- Publication date May 18, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HIGH PURITY ALUMINUM TOP COAT ON SUBSTRATE
- Publication number 20160002811
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Jennifer Y. SUN
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS TOWARD PREVENTING ESC BONDING ADHESIVE EROSION
- Publication number 20150183187
- Publication date Jul 2, 2015
- Applied Materials, Inc.
- Xing LIN
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK AND SHOWERHEAD WITH ENHANCED THERMAL PROPERTIES...
- Publication number 20150061237
- Publication date Mar 5, 2015
- Applied Materials, Inc.
- Jennifer SUN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ENHANCED CLEANING PROCESS OF CHAMBER USED PLASMA SPRAY COATING WITH...
- Publication number 20140221188
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- Sumanth Banda
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20140209027
- Publication date Jul 31, 2014
- DMITRY LUBOMIRSKY
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK
- Publication number 20140203526
- Publication date Jul 24, 2014
- Applied Materials, Inc.
- Sumanth Banda
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
ADHESIVE MATERIAL USED FOR JOINING CHAMBER COMPONENTS
- Publication number 20130344285
- Publication date Dec 26, 2013
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
METHODS AND APPARATUS TOWARD PREVENTING ESC BONDING ADHESIVE EROSION
- Publication number 20130286530
- Publication date Oct 31, 2013
- Xing Lin
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES
- Publication number 20120255635
- Publication date Oct 11, 2012
- Applied Materials, Inc.
- Sumanth BANDA
- B08 - CLEANING
Information Patent Application
METHOD FOR DEBONDING COMPONENTS IN A CHAMBER
- Publication number 20120118510
- Publication date May 17, 2012
- Applied Materials, Inc.
- Sumanth Banda
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK AND SHOWERHEAD WITH ENHANCED THERMAL PROPERTIES...
- Publication number 20120104703
- Publication date May 3, 2012
- Applied Materials, Inc.
- Jennifer Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

SUMANTH BANDA

Person

Patents Grantslast 30 patents

Chambers and coatings for reducing backside damage

Reduced localized force in electrostatic chucking

Condition selectable backside gas

Substrate support carrier with improved bond layer protection

Substrate support carrier with improved bond layer protection

Showerhead having a detachable gas distribution plate

Plasma resistant coating of porous body by atomic layer deposition

Copolymerized high temperature bonding component

Bond protection around porous plugs

High purity aluminum top coat on substrate

Plasma resistant coating of porous body by atomic layer deposition

Showerhead having a detachable gas distribution plate

Copolymerized high temperature bonding component

High purity aluminum top coat on substrate

Showerhead having a detachable gas distribution plate

Electrostatic chuck and showerhead with enhanced thermal properties...

Enhanced cleaning process of chamber used plasma spray coating with...

Temperature management of aluminium nitride electrostatic chuck

Methods and apparatus toward preventing ESC bonding adhesive erosion

Electrostatic chuck and showerhead with enhanced thermal properties...

Patents Applicationslast 30 patents

CONDITION SELECTABLE BACKSIDE GAS

CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE

REDUCED LOCALIZED FORCE IN ELECTROSTATIC CHUCKING

SUBSTRATE SUPPORT CARRIER WITH IMPROVED BOND LAYER PROTECTION

CONDITION SELECTABLE BACKSIDE GAS

SUBSTRATE SUPPORT CARRIER WITH IMPROVED BOND LAYER PROTECTION

SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE

COPOLYMERIZED HIGH TEMPERATURE BONDING COMPONENT

BOND PROTECTION AROUND POROUS PLUGS

EROSION RESISTANT ATOMIC LAYER DEPOSITION COATINGS

PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION

PLASMA RESISTANT COATING OF POROUS BODY BY ATOMIC LAYER DEPOSITION

HIGH PURITY ALUMINUM TOP COAT ON SUBSTRATE

SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE

COPOLYMERIZED HIGH TEMPERATURE BONDING COMPONENT

HIGH PURITY ALUMINUM TOP COAT ON SUBSTRATE

METHODS AND APPARATUS TOWARD PREVENTING ESC BONDING ADHESIVE EROSION

ELECTROSTATIC CHUCK AND SHOWERHEAD WITH ENHANCED THERMAL PROPERTIES...

ENHANCED CLEANING PROCESS OF CHAMBER USED PLASMA SPRAY COATING WITH...

SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE

TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK

ADHESIVE MATERIAL USED FOR JOINING CHAMBER COMPONENTS

METHODS AND APPARATUS TOWARD PREVENTING ESC BONDING ADHESIVE EROSION

METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES

METHOD FOR DEBONDING COMPONENTS IN A CHAMBER

ELECTROSTATIC CHUCK AND SHOWERHEAD WITH ENHANCED THERMAL PROPERTIES...