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Sumedh Acharya
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-gas straight channel showerhead
Patent number
8,481,118
Issue date
Jul 9, 2013
Applied Materials, Inc.
Brian H. Burrows
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multiple precursor showerhead with by-pass ports
Patent number
8,361,892
Issue date
Jan 29, 2013
Applied Materials, Inc.
Alexander Tam
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Multi-gas straight channel showerhead
Patent number
7,976,631
Issue date
Jul 12, 2011
Applied Materials, Inc.
Brian H. Burrows
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD
Publication number
20120024388
Publication date
Feb 2, 2012
Brian H. Burrows
C30 - CRYSTAL GROWTH
Information
Patent Application
MULTIPLE PRECURSOR SHOWERHEAD WITH BY-PASS PORTS
Publication number
20110256645
Publication date
Oct 20, 2011
Applied Materials, Inc.
Alexander Tam
C30 - CRYSTAL GROWTH
Information
Patent Application
HVPE SHOWERHEAD DESIGN
Publication number
20100215854
Publication date
Aug 26, 2010
Brian H. Burrows
C30 - CRYSTAL GROWTH
Information
Patent Application
MULTI-GAS SPIRAL CHANNEL SHOWERHEAD
Publication number
20090095222
Publication date
Apr 16, 2009
Alexander Tam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD
Publication number
20090098276
Publication date
Apr 16, 2009
APPLIED MATERIALS, INC.
Brian H. BURROWS
C30 - CRYSTAL GROWTH
Information
Patent Application
HVPE SHOWERHEAD DESIGN
Publication number
20080314311
Publication date
Dec 25, 2008
Brian H. Burrows
C30 - CRYSTAL GROWTH
Information
Patent Application
SHOWERHEAD DESIGN WITH PRECURSOR PRE-MIXING
Publication number
20080314317
Publication date
Dec 25, 2008
BRIAN H. BURROWS
C30 - CRYSTAL GROWTH
Information
Patent Application
CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION
Publication number
20080276860
Publication date
Nov 13, 2008
BRIAN H. BURROWS
C30 - CRYSTAL GROWTH