Sumie Segawa

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Nakakoma-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for measuring electron density of plasma and p...
- Patent number 7,582,182
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Naoki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring electron density of plasma and p...
- Patent number 7,532,322
- Issue date May 12, 2009
- Tokyo Electron Limited
- Chishio Koshimizu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring electron density of plasma and p...
- Patent number 7,339,656
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Naoki Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing system
- Patent number 6,207,007
- Issue date Mar 27, 2001
- Tokyo Electron Limited
- Sumie Segawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110061811
- Publication date Mar 17, 2011
- TOKYO ELECTRON LIMITED
- Toru Ito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20110017706
- Publication date Jan 27, 2011
- TOKYO ELECTRON LIMITED
- Tetsuro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING ELECTRON DENSITY OF PLASMA AND P...
- Publication number 20070284044
- Publication date Dec 13, 2007
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING ELECTRON DENSITY OF PLASMA AND P...
- Publication number 20070193514
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING ELECTRON DENSITY OF PLASMA AND P...
- Publication number 20070089835
- Publication date Apr 26, 2007
- TOKYO ELECTRON LIMITED
- Chishio Koshimizu
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring electron density of plasma and p...
- Publication number 20050009347
- Publication date Jan 13, 2005
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- G01 - MEASURING TESTING