SUMIN PARK

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20230282453
- Publication date Sep 7, 2023
- Samsung Electronics Co., Ltd.
- HAKYOUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, A...
- Publication number 20230187185
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- SUMIN PARK
- H01 - BASIC ELECTRIC ELEMENTS