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Itami, JP
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last 30 patents
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Patent Grant
Method for forming patterns by plasma etching
Patent number
4,377,734
Issue date
Mar 22, 1983
Mitsubishi Denki Kabushiki Kaisha
Yoji Mashiko
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for forming a fine pattern of an aluminum film
Patent number
4,314,874
Issue date
Feb 9, 1982
Mitsubishi Denki Kabushiki Kaisha
Haruhiko Abe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...