Sumio Yabe

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and su...
- Patent number 7,578,886
- Issue date Aug 25, 2009
- Ebara Corporation
- Kaoru Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus, substrate processing method, and su...
- Publication number 20060234503
- Publication date Oct 19, 2006
- Kaoru Yamada
- B08 - CLEANING