Sumito NAKADA

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam drawing apparatus and charged particle beam d...
- Patent number 10,153,130
- Issue date Dec 11, 2018
- NuFlare Technology, Inc.
- Sumito Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method, computer-readable recording m...
- Patent number 9,460,892
- Issue date Oct 4, 2016
- NuFlare Technology, Inc.
- Sumito Nakada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam drawing method, computer-readable recording m...
- Patent number 9,236,154
- Issue date Jan 12, 2016
- NuFlare Technology, Inc.
- Sumito Nakada
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20160181065
- Publication date Jun 23, 2016
- NuFlare Technology, Inc.
- Sumito NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, COMPUTER-READABLE RECORDING M...
- Publication number 20140166869
- Publication date Jun 19, 2014
- NuFlare Technology, Inc.
- Sumito NAKADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM DRAWING METHOD, COMPUTER-READABLE RECORDING M...
- Publication number 20130177855
- Publication date Jul 11, 2013
- NuFlare Technology, Inc.
- Sumito NAKADA
- B82 - NANO-TECHNOLOGY