Sumito Shimizu

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for patterning a reticle blank by electron-be...
- Patent number 6,972,417
- Issue date Dec 6, 2005
- Nikon Corporation
- Wakako Suganuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam microlithography methods exhibiting reduced c...
- Patent number 6,756,182
- Issue date Jun 29, 2004
- Nikon Corporation
- Sumito Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor light receiving element
- Patent number 6,734,515
- Issue date May 11, 2004
- Mitsubishi Cable Industries, Ltd.
- Kazuyuki Tadatomo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of repairing a mask with high electron scattering and low el...
- Patent number 6,440,615
- Issue date Aug 27, 2002
- Nikon Corporation
- Sumito Shimizu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light absorption measurement apparatus and methods
- Patent number 6,108,096
- Issue date Aug 22, 2000
- Nikon Corporation
- Yoshijiro Ushio
- G01 - MEASURING TESTING
Information Patent Grant
Etching apparatus and method for manufacturing optical devices
- Patent number 6,074,513
- Issue date Jun 13, 2000
- Nikon Corporation
- Sumito Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods and apparatus for correcting the proximity effect in a char...
- Publication number 20030044697
- Publication date Mar 6, 2003
- NIKON CORPORATION
- Sumito Shimizu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Charged-particle-beam microlithography methods exhibiting reduced c...
- Publication number 20020187411
- Publication date Dec 12, 2002
- NIKON CORPORATION
- Sumito Shimizu
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods and apparatus for cleaning an object using an electron beam...
- Publication number 20020053353
- Publication date May 9, 2002
- Shintaro Kawata
- B08 - CLEANING
Information Patent Application
Method for correcting opaque defects in reticles for charged-partic...
- Publication number 20020024011
- Publication date Feb 28, 2002
- NIKON CORPORATION
- Sumito Shimizu
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and methods for patterning a reticle blank by electron-be...
- Publication number 20020012853
- Publication date Jan 31, 2002
- NIKON CORPORATION
- Wakako Suganuma
- B82 - NANO-TECHNOLOGY