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ILD planarization method
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Patent number 6,432,827
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Issue date Aug 13, 2002
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United Microelectronics Corp.
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Sun-Chieh Chien
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H01 - BASIC ELECTRIC ELEMENTS
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Method of field implantation
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Patent number 6,313,006
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Issue date Nov 6, 2001
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United Microelectronics, Corp.
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C. C. Hsue
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H01 - BASIC ELECTRIC ELEMENTS
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Method of forming contact
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Patent number 6,169,016
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Issue date Jan 2, 2001
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United Microelectronics Corp.
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Sun-Chieh Chien
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H01 - BASIC ELECTRIC ELEMENTS
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