Sun Ja Kim

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
- Patent number 11,776,807
- Issue date Oct 3, 2023
- ASM IP Holding, B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective PEALD of oxide on dielectric
- Patent number 11,728,164
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of me...
- Patent number 11,501,965
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Lingyun Jia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective PEALD of oxide on dielectric
- Patent number 11,170,993
- Issue date Nov 9, 2021
- ASM IP Holding B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
- Patent number 11,158,500
- Issue date Oct 26, 2021
- ASM IP Holding B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform deposition of SiOC on dielectric and metal surfaces
- Patent number 10,991,573
- Issue date Apr 27, 2021
- ASM IP Holding B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE PEALD OF OXIDE ON DIELECTRIC
- Publication number 20220076949
- Publication date Mar 10, 2022
- ASM IP HOLDING B.V.
- Eva Tois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF OX...
- Publication number 20220044931
- Publication date Feb 10, 2022
- ASM IP HOLDING B.V.
- Lingyun Jia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF OX...
- Publication number 20200395211
- Publication date Dec 17, 2020
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PEALD OF OXIDE ON DIELECTRIC
- Publication number 20200066512
- Publication date Feb 27, 2020
- ASM IP HOLDING B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM DEPOSITION OF SiOC ON DIELECTRIC AND METAL SURFACES
- Publication number 20190172701
- Publication date Jun 6, 2019
- ASM IP HOLDING B.V.
- Lingyun Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF ME...
- Publication number 20180350587
- Publication date Dec 6, 2018
- ASM IP HOLDING B.V.
- Lingyun Jia
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Plasma enhanced deposition processes for controlled formation of ox...

Selective PEALD of oxide on dielectric

Plasma enhanced deposition processes for controlled formation of me...

Selective PEALD of oxide on dielectric

Plasma enhanced deposition processes for controlled formation of ox...

Uniform deposition of SiOC on dielectric and metal surfaces

Patents Applicationslast 30 patents

SELECTIVE PEALD OF OXIDE ON DIELECTRIC

PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF OX...

PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF OX...

SELECTIVE PEALD OF OXIDE ON DIELECTRIC

UNIFORM DEPOSITION OF SiOC ON DIELECTRIC AND METAL SURFACES

PLASMA ENHANCED DEPOSITION PROCESSES FOR CONTROLLED FORMATION OF ME...