Sun Young Han

Person

Gyeonggi-do, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck for preventing an arc
- Patent number 6,847,516
- Issue date Jan 25, 2005
- Jusung Engineering Co., Ltd.
- Gi-Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance matching circuit for inductively coupled plasma source
- Patent number 6,770,836
- Issue date Aug 3, 2004
- Jusung Engineering Co., Ltd.
- Gi-Chung Kwon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for generating inductively coupled plasma
- Patent number 6,685,800
- Issue date Feb 3, 2004
- Jusung Engineering Co. Ltd.
- Hong Seub Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel resonance whirl antenna
- Patent number 6,653,988
- Issue date Nov 25, 2003
- Jusung Engineering, Co., LTD
- Gi Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HETEROCYCLIC DERIVATIVES
- Publication number 20110028467
- Publication date Feb 3, 2011
- Sung Oh Ahn
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Air exhaust system of a chamber for manufacturing semiconductor device
- Publication number 20030066605
- Publication date Apr 10, 2003
- Bu-Jin Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic chuck for preventing an arc
- Publication number 20030043530
- Publication date Mar 6, 2003
- Gi-Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Parallel resonance whirl antenna
- Publication number 20030001792
- Publication date Jan 2, 2003
- Jusung Engineering Co., Ltd.
- Gi Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus having parallel resonance antenna for v...
- Publication number 20020189763
- Publication date Dec 19, 2002
- Jusung Engineering Co., Ltd.
- Gi Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Impedance matching circuit for inductively coupled plasma source
- Publication number 20020130110
- Publication date Sep 19, 2002
- Gi-Chung Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for generating inductively coupled plasma
- Publication number 20020088548
- Publication date Jul 11, 2002
- JUSUNG ENGINEERING CO., LTD.
- Hong Seub Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20020007794
- Publication date Jan 24, 2002
- Hong-Sik Byun
- H01 - BASIC ELECTRIC ELEMENTS

Sun Young Han

Person

Patents Grantslast 30 patents

Electrostatic chuck for preventing an arc

Impedance matching circuit for inductively coupled plasma source

Apparatus for generating inductively coupled plasma

Parallel resonance whirl antenna

Patents Applicationslast 30 patents

HETEROCYCLIC DERIVATIVES

Air exhaust system of a chamber for manufacturing semiconductor device

Electrostatic chuck for preventing an arc

Parallel resonance whirl antenna

Plasma processing apparatus having parallel resonance antenna for v...

Impedance matching circuit for inductively coupled plasma source

Apparatus for generating inductively coupled plasma

Plasma processing apparatus