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Sunao EGASHIRA
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Wilkinson-type combiner and RF generator
Patent number
11,967,750
Issue date
Apr 23, 2024
Hitachi Kokusai Electric Inc.
Sunao Egashira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF generator device and substrate processing apparatus
Patent number
11,901,159
Issue date
Feb 13, 2024
Hitachi Kokusai Electric Inc.
Naoto Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF generator
Patent number
11,810,759
Issue date
Nov 7, 2023
Hitachi Kokusai Electric Inc.
Yoshiyuki Oshida
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HIGH-FREQUENCY POWER SOURCE DEVICE
Publication number
20220122806
Publication date
Apr 21, 2022
Hitachi Kokusai Electric Inc.
Yoshiyuki OSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-FREQUENCY POWER SUPPLY DEVICE AND SUBSTRATE PROCESSING DEVICE
Publication number
20220115210
Publication date
Apr 14, 2022
Hitachi Kokusai Electric Inc.
NAOTO TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WILKINSON-TYPE COMBINER AND RF GENERATOR
Publication number
20220045417
Publication date
Feb 10, 2022
Hitachi Kokusai Electric Inc.
Sunao EGASHIRA
H01 - BASIC ELECTRIC ELEMENTS