Sunao MURAOKA

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming silicon oxide film
- Patent number 8,318,267
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Yoshiro Kabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 8,293,067
- Issue date Oct 23, 2012
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing device and gate valve for microwave pla...
- Patent number 7,993,488
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Sunao Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for regulating pressure in two chambers
- Patent number 5,913,978
- Issue date Jun 22, 1999
- Tokyo Electron Ltd.
- Susumu Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20110265952
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PERFORMING PLASMA PROCESS
- Publication number 20110253311
- Publication date Oct 20, 2011
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
- Publication number 20100247805
- Publication date Sep 30, 2010
- Tokyo Electron Limited
- Yoshiro Kabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PLACING TABLE USED FOR SA...
- Publication number 20090041568
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Sunao Muraoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA PROCESSING DEVICE AND GATE VALVE FOR MICROWAVE PLA...
- Publication number 20080006371
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Sunao MURAOKA
- H01 - BASIC ELECTRIC ELEMENTS