Sunao Murata

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspecting apparatus using multiple color light to detect de...
- Patent number 5,072,128
- Issue date Dec 10, 1991
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for detecting foreign particles on a surface of a reticle...
- Patent number 4,999,510
- Issue date Mar 12, 1991
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspecting apparatus for determining presence and location of forei...
- Patent number 4,966,457
- Issue date Oct 30, 1990
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus with four light detectors for checking surface of mask wi...
- Patent number 4,889,998
- Issue date Dec 26, 1989
- Nikon Corporation
- Fuminori Hayano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY