Sung Don KWAK

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Suwon, KR

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Patents Grantslast 30 patents

Information Patent Grant
Slit valve unit and film forming apparatus having the same
- Patent number 8,815,616
- Issue date Aug 26, 2014
- Samsung Electronics Co., Ltd.
- Sang Kyu Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM INCLUDIN...
- Publication number 20150251228
- Publication date Sep 10, 2015
- Samsung Electronics Co., Ltd.
- Sang Kyu BANG
- B08 - CLEANING
Information Patent Application
WAFER HOLDER CLEANING APPARATUS AND FILM DEPOSITION SYSTEM INCLUDIN...
- Publication number 20140130732
- Publication date May 15, 2014
- Samsung Electronics Co., Ltd.
- Sang Kyu BANG
- B08 - CLEANING
Information Patent Application
SLIT VALVE UNIT AND FILM FORMING APPARATUS HAVING THE SAME
- Publication number 20140106478
- Publication date Apr 17, 2014
- Samsung Electronics Co., Ltd.
- Sang Kyu Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...