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Damariscotta, ME, US
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last 30 patents
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Patent Grant
Dopant precursors for mono-layer doping
Patent number
9,929,014
Issue date
Mar 27, 2018
Entegris, Inc.
Thomas M. Cameron
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
DOPANT PRECURSORS FOR MONO-LAYER DOPING
Publication number
20160276155
Publication date
Sep 22, 2016
Entegris, Inc.
Thomas M. Cameron
H01 - BASIC ELECTRIC ELEMENTS