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Sung Ho Kwak
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Hwaseong, KR
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for cleaning photomask
Patent number
9,400,425
Issue date
Jul 26, 2016
AP Systems Inc.
Sung Ho Kwak
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR CLEANING PHOTOMASK
Publication number
20140345646
Publication date
Nov 27, 2014
AP SYSTEMS INC.
Sung Ho Kwak
B08 - CLEANING