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Sung Jin JUNG
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San Ramon, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Directional deposition in etch chamber
Patent number
11,742,212
Issue date
Aug 29, 2023
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Hybrid stair-step etch
Patent number
9,741,563
Issue date
Aug 22, 2017
Lam Research Corporation
Hua Xiang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DIRECTIONAL DEPOSITION IN ETCH CHAMBER
Publication number
20220028697
Publication date
Jan 27, 2022
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID STAIR-STEP ETCH
Publication number
20170213723
Publication date
Jul 27, 2017
LAM RESEARCH CORPORATION
Hua XIANG
H01 - BASIC ELECTRIC ELEMENTS