Sung Jin JUNG

Person

  • San Ramon, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Directional deposition in etch chamber

    • Patent number 11,742,212
    • Issue date Aug 29, 2023
    • Lam Research Corporation
    • Zhongkui Tan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Hybrid stair-step etch

    • Patent number 9,741,563
    • Issue date Aug 22, 2017
    • Lam Research Corporation
    • Hua Xiang
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    DIRECTIONAL DEPOSITION IN ETCH CHAMBER

    • Publication number 20220028697
    • Publication date Jan 27, 2022
    • LAM RESEARCH CORPORATION
    • Zhongkui Tan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HYBRID STAIR-STEP ETCH

    • Publication number 20170213723
    • Publication date Jul 27, 2017
    • LAM RESEARCH CORPORATION
    • Hua XIANG
    • H01 - BASIC ELECTRIC ELEMENTS