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Sung Kim
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Pflugerville, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor structure with a titanium aluminum nitride layer and...
Patent number
6,552,431
Issue date
Apr 22, 2003
Micron Technology, Inc.
Scott G. Meikle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure having interconnects on a projecting region...
Patent number
6,274,897
Issue date
Aug 14, 2001
Micron Technology, Inc.
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure with a titanium aluminum nitride layer and...
Patent number
6,239,492
Issue date
May 29, 2001
Micron Technology, Inc.
Scott G. Meikle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of chemical mechanical polishing
Patent number
6,234,877
Issue date
May 22, 2001
Micron Technology, Inc.
Daniel A. Koos
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor structure with a titanium aluminum nitride layer and...
Patent number
6,218,295
Issue date
Apr 17, 2001
Micron Technology, Inc.
Scott G. Meikle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing for polishing dissimilar conductive layers in a semicond...
Patent number
6,204,169
Issue date
Mar 20, 2001
Motorola Inc.
Rajeev Bajaj
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of chemical mechanical polishing
Patent number
6,120,354
Issue date
Sep 19, 2000
Micron Technology, Inc.
Daniel A. Koos
B24 - GRINDING POLISHING
Information
Patent Grant
Processing for polishing dissimilar conductive layers in a semicond...
Patent number
5,985,755
Issue date
Nov 16, 1999
Rajeev Bajaj
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for forming a semiconductor device
Patent number
5,961,373
Issue date
Oct 5, 1999
Motorola, Inc.
Lei Ping Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Method for reducing the heights of interconnects on a projecting re...
Patent number
5,945,348
Issue date
Aug 31, 1999
Micron Technology, Inc.
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of chemical mechanical polishing
Patent number
5,934,980
Issue date
Aug 10, 1999
Micron Technology, Inc.
Daniel A. Koos
B24 - GRINDING POLISHING
Information
Patent Grant
Process for polishing a semiconductor device substrate
Patent number
5,916,011
Issue date
Jun 29, 1999
Motorola, Inc.
Sung C. Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Method of chemical mechanical polishing (CMP) using an underpad wit...
Patent number
5,899,745
Issue date
May 4, 1999
Motorola, Inc.
Sung C. Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Sputtering with collinator cleaning within the sputtering chamber
Patent number
5,409,587
Issue date
Apr 25, 1995
Micron Technology, Inc.
Gurtej S. Sandhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for shaping features of a semiconductor structure using chem...
Patent number
5,302,233
Issue date
Apr 12, 1994
Micron Semiconductor, Inc.
Sung C. Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Process for depositing aluminum nitride (AlN) using nitrogen plasma...
Patent number
5,270,263
Issue date
Dec 14, 1993
Micron Technology, Inc.
Sung C. Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Titanium/aluminum/nitrogen material for semiconductor devices
Patent number
5,231,306
Issue date
Jul 27, 1993
Micron Technology, Inc.
Scott G. Meikle
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of chemical mechanical polishing
Publication number
20010055941
Publication date
Dec 27, 2001
Micron Technology, Inc.
Daniel A. Koos
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor structure with a titanium aluminum nitride layer and...
Publication number
20010040293
Publication date
Nov 15, 2001
Micron Technology, Inc.
Scott G. Meikle
H01 - BASIC ELECTRIC ELEMENTS