Sung Tae JE

Person

Yongin-Si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead and substrate processing apparatus including the same
- Patent number 11,242,601
- Issue date Feb 8, 2022
- Eugene Technology Co., Ltd.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for assembling tube assembly
- Patent number 10,840,118
- Issue date Nov 17, 2020
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 10,793,949
- Issue date Oct 6, 2020
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,741,396
- Issue date Aug 11, 2020
- Eugene Technology Co., Ltd.
- Woo Duck Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting unit, substrate processing apparatus, and meth...
- Patent number 10,622,228
- Issue date Apr 14, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for substrate processing using exhaust ports
- Patent number 10,593,545
- Issue date Mar 17, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,364,494
- Issue date Jul 30, 2019
- Eugene Technology Co., Ltd.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,337,103
- Issue date Jul 2, 2019
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 10,287,687
- Issue date May 14, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,199,225
- Issue date Feb 5, 2019
- Eugene Technology Co., Ltd.
- Woo Duck Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting unit, substrate processing apparatus, and meth...
- Patent number 10,192,760
- Issue date Jan 29, 2019
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,161,036
- Issue date Dec 25, 2018
- Eugene Technology Co., Ltd.
- Jun Jin Hyon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,145,012
- Issue date Dec 4, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including heat-shield plate
- Patent number 9,953,850
- Issue date Apr 24, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including exhaust ports and substrat...
- Patent number 9,875,895
- Issue date Jan 23, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus, and method for controlling temperatu...
- Patent number 9,758,870
- Issue date Sep 12, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate for supplying reaction gas havin...
- Patent number 9,620,395
- Issue date Apr 11, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including auxiliary gas supply port
- Patent number 9,593,415
- Issue date Mar 14, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device equipped with semicircle shaped antenna
- Patent number 9,416,451
- Issue date Aug 16, 2016
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate-processing apparatus and substrate-processing method for...
- Patent number 8,771,418
- Issue date Jul 8, 2014
- Eugene Technology Co., Ltd.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 8,528,499
- Issue date Sep 10, 2013
- Eugene Technology Co., Ltd.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20200263303
- Publication date Aug 20, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae JE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180298493
- Publication date Oct 18, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ASSEMBLING TUBE ASSEMBLY
- Publication number 20180240696
- Publication date Aug 23, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR CLEANING CHAMBER
- Publication number 20180105933
- Publication date Apr 19, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Woo Duck JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180090322
- Publication date Mar 29, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Woo Duck JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180090323
- Publication date Mar 29, 2018
- EUGENE TECHNOLOGY CO., LTD.
- Woo Duck JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170183771
- Publication date Jun 29, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST PORTS AND SUBSTRAT...
- Publication number 20170148649
- Publication date May 25, 2017
- EUGENE TECHNOLOGY CO., LTD.
- IL-KWANG YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20170137938
- Publication date May 18, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Jun Jin HYON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20170110347
- Publication date Apr 20, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170073810
- Publication date Mar 16, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Jun Jin HYON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170073813
- Publication date Mar 16, 2017
- EUGENE TECHNOLOGY CO., LTD.
- Jun Jin HYON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289831
- Publication date Oct 6, 2016
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae JE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20160289834
- Publication date Oct 6, 2016
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae JE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20160049317
- Publication date Feb 18, 2016
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, AND METHOD FOR CONTROLLING TEMPERATU...
- Publication number 20150299860
- Publication date Oct 22, 2015
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae JE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING AUXILIARY GAS SUPPLY PORT
- Publication number 20150013909
- Publication date Jan 15, 2015
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING HEAT-SHIELD PLATE
- Publication number 20140348617
- Publication date Nov 27, 2014
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE FOR SUPPLYING REACTION GAS HAVIN...
- Publication number 20140345801
- Publication date Nov 27, 2014
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST PORTS AND SUBSTRAT...
- Publication number 20140315375
- Publication date Oct 23, 2014
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE FOR SUPPLYING REACTION GAS THROUGH SYMM...
- Publication number 20130186337
- Publication date Jul 25, 2013
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE EQUIPPED WITH SEMICIRCLE SHAPED ANTENNA
- Publication number 20130180453
- Publication date Jul 18, 2013
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-TRANSFERRING METHOD
- Publication number 20130149078
- Publication date Jun 13, 2013
- EUGENE TECHNOLOGY CO., LTD.
- Sung Tae Je
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRI...
- Publication number 20120160419
- Publication date Jun 28, 2012
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD FOR...
- Publication number 20120135145
- Publication date May 31, 2012
- Sung Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20110028001
- Publication date Feb 3, 2011
- EUGENE TECHNOLOGY CO., LTD.
- Sung-Tae Je
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...
- Publication number 20100319855
- Publication date Dec 23, 2010
- EUGENE TECHNOLOGY CO., LTD.
- Dong-Keun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sung Tae JE

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Showerhead and substrate processing apparatus including the same

Substrate processing apparatus and method for assembling tube assembly

Substrate processing apparatus and substrate processing method usin...

Substrate processing apparatus

Substrate supporting unit, substrate processing apparatus, and meth...

Method for substrate processing using exhaust ports

Substrate processing apparatus

Substrate processing apparatus

Substrate processing device

Substrate processing apparatus

Substrate supporting unit, substrate processing apparatus, and meth...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus including heat-shield plate

Substrate processing apparatus including exhaust ports and substrat...

Substrate treatment apparatus, and method for controlling temperatu...

Apparatus for processing substrate for supplying reaction gas havin...

Substrate processing apparatus including auxiliary gas supply port

Substrate processing device equipped with semicircle shaped antenna

Substrate-processing apparatus and substrate-processing method for...

Substrate processing apparatus and method

Patents Applicationslast 30 patents

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ASSEMBLING TUBE ASSEMBLY

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR CLEANING CHAMBER

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST PORTS AND SUBSTRAT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE

SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...

SUBSTRATE TREATMENT APPARATUS, AND METHOD FOR CONTROLLING TEMPERATU...

SUBSTRATE PROCESSING APPARATUS INCLUDING AUXILIARY GAS SUPPLY PORT

SUBSTRATE PROCESSING APPARATUS INCLUDING HEAT-SHIELD PLATE

APPARATUS FOR PROCESSING SUBSTRATE FOR SUPPLYING REACTION GAS HAVIN...

SUBSTRATE PROCESSING APPARATUS INCLUDING EXHAUST PORTS AND SUBSTRAT...

SUBSTRATE PROCESSING DEVICE FOR SUPPLYING REACTION GAS THROUGH SYMM...

SUBSTRATE PROCESSING DEVICE EQUIPPED WITH SEMICIRCLE SHAPED ANTENNA

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-TRANSFERRING METHOD

SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRI...

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD FOR...

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METH...