Sunggil KANG

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus and wafer processing method using the same
- Patent number 11,990,348
- Issue date May 21, 2024
- Samsung Electronics Co., Ltd.
- Chanyeong Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow cathode, an apparatus including a hollow cathode for manufac...
- Patent number 11,798,788
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing substrate and method of manufac...
- Patent number 11,289,308
- Issue date Mar 29, 2022
- Samsung Electronics Co., Ltd.
- Sangjin An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,950,414
- Issue date Mar 16, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,522,332
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,347,468
- Issue date Jul 9, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME
- Publication number 20240282586
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Chanyeong Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240203701
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Soonku Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
- Publication number 20240159657
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING TH...
- Publication number 20240087856
- Publication date Mar 14, 2024
- Samsung Electronics Co., Ltd.
- Jiwon Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20230071985
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Woorim LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWER HEAD AND EDGE RING...
- Publication number 20220301827
- Publication date Sep 22, 2022
- Samsung Electronics Co., Ltd.
- Woorim LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME
- Publication number 20220068659
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- CHANYEONG JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE AND METHOD OF MANUFAC...
- Publication number 20210098232
- Publication date Apr 1, 2021
- Samsung Electronics Co., Ltd.
- Sangjin AN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20210057193
- Publication date Feb 25, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190279846
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190122860
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Method of Manufacturing Semiconduct...
- Publication number 20190122866
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...
- Publication number 20190122867
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS

Sunggil KANG

Person

Patents Grantslast 30 patents

Wafer processing apparatus and wafer processing method using the same

Hollow cathode, an apparatus including a hollow cathode for manufac...

Apparatus and method for processing substrate and method of manufac...

Plasma processing apparatus and method of manufacturing semiconduct...

Plasma processing system, electron beam generator, and method of fa...

Plasma processing system, electron beam generator, and method of fa...

Patents Applicationslast 30 patents

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING TH...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWER HEAD AND EDGE RING...

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE AND METHOD OF MANUFAC...

HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

Plasma Processing Apparatus and Method of Manufacturing Semiconduct...

HOLLOW CATHODE, AN APPARATUS INCLUDING A HOLLOW CATHODE FOR MANUFAC...