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Sunghoon Lee
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Rexford, NY, US
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last 30 patents
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Patent Grant
Gimbal for CMP tool conditioning disk having flexible metal diaphragm
Patent number
10,814,457
Issue date
Oct 27, 2020
GLOBALFOUNDRIES Inc.
Sunghoon Lee
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
POLISHING PAD WITH PROTRUDED POLISHING STRUCTURES, SYSTEM FOR MANUF...
Publication number
20220410339
Publication date
Dec 29, 2022
Smart Pad LLC
Sunghoon LEE
B24 - GRINDING POLISHING
Information
Patent Application
GIMBAL FOR CMP TOOL CONDITIONING DISK HAVING FLEXIBLE METAL DIAPHRAGM
Publication number
20190283215
Publication date
Sep 19, 2019
GLOBALFOUNDRIES INC.
Sunghoon Lee
B24 - GRINDING POLISHING