SungHyup KIM

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma treatment apparatus, a method of monitoring a process of man...
- Patent number 12,170,233
- Issue date Dec 17, 2024
- Samsung Electronics Co., Ltd.
- Meehyun Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
- Patent number 11,852,984
- Issue date Dec 26, 2023
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of manufacturing a semiconductor package
- Patent number 11,848,301
- Issue date Dec 19, 2023
- Samsung Electronics Co., Ltd.
- Jonggu Lee
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Chip bonding apparatus and method of manufacturing semiconductor de...
- Patent number 11,837,573
- Issue date Dec 5, 2023
- Samsung Electronics Co., Ltd.
- Junhyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for generating extreme ultraviolet light and lithography...
- Patent number 11,720,027
- Issue date Aug 8, 2023
- Samsung Electronics Co., Ltd.
- Injae Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet accelerating assembly and extreme ultra-violet lithography...
- Patent number 11,711,883
- Issue date Jul 25, 2023
- Samsung Electronics Co., Ltd.
- Minseok Choi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Collector mirror and apparatus for creating extreme ultraviolet lig...
- Patent number 11,698,590
- Issue date Jul 11, 2023
- Samsung Electronics Co., Ltd.
- Hoseok Song
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Bonding head including a thermal compensator, die bonding apparatus...
- Patent number 11,626,381
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Jonggu Lee
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Semiconductor chip bonding apparatus including head having thermall...
- Patent number 11,607,741
- Issue date Mar 21, 2023
- Samsung Electronics Co., Ltd.
- Sebin Choi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
- Patent number 11,599,031
- Issue date Mar 7, 2023
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,538,697
- Issue date Dec 27, 2022
- Samsung Electronics Co., Ltd.
- Sang Ki Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle for reflective mask
- Patent number 11,454,882
- Issue date Sep 27, 2022
- Samsung Electronics Co., Ltd.
- Jinhwan Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light source system
- Patent number 11,415,891
- Issue date Aug 16, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light source systems
- Patent number 11,304,287
- Issue date Apr 12, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
- Patent number 11,231,656
- Issue date Jan 25, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Ring assembly and chuck assembly having the same
- Patent number 10,672,629
- Issue date Jun 2, 2020
- Samsung Electronics Co., Ltd.
- SungHyup Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate bonding apparatus having adsorption sectors with differen...
- Patent number 10,411,062
- Issue date Sep 10, 2019
- Samsung Electronics Co., Ltd.
- Jun Hyung Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME
- Publication number 20250021008
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Yebin Nam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME,...
- Publication number 20240424457
- Publication date Dec 26, 2024
- Samsung Electronics Co., Ltd.
- Hyunjoong Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ROBOT BLADE
- Publication number 20240416529
- Publication date Dec 19, 2024
- Samsung Electronics Co., Ltd.
- Kyunghoon Joo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SOURCE GAS NOZZLE AND SEMICONDUCTOR WAFER PROCESSING APPARATUS INCL...
- Publication number 20240271282
- Publication date Aug 15, 2024
- SUMSUNG ELECTRONICS CO., LTD.
- Sang Yup Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE VESSEL FOR EUV
- Publication number 20240215140
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Daegeun Yoon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240142886
- Publication date May 2, 2024
- Samsung Electronics Co., Ltd.
- Injae Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- Publication number 20240121877
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Injae LEE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS FOR HEATING WAFER
- Publication number 20240071806
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Jeongdu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIPE BLOCKAGE PREDICTION METHODS
- Publication number 20240061982
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Hanahchim CHOUNG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR PACKAGE
- Publication number 20230238351
- Publication date Jul 27, 2023
- Samsung Electronics Co., Ltd.
- Jonggu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK TABLE AND WAFER CHUCK SYSTEM
- Publication number 20230207369
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Jonggu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING CHUCKING FORCE
- Publication number 20230191547
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Jeongdu KIM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...
- Publication number 20230185207
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Sunghyup KIM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIG...
- Publication number 20230071131
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Hoseok SONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20230037038
- Publication date Feb 2, 2023
- Samsung Electronics Co., Ltd.
- Byoungcheol HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT APPARATUS, A METHOD OF MONITORING A PROCESS OF MAN...
- Publication number 20220181219
- Publication date Jun 9, 2022
- Samsung Electronics Co., Ltd.
- MEEHYUN LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROPLET ACCELERATING ASSEMBLY AND EXTREME ULTRA-VIOLET LITHOGRAPHY...
- Publication number 20220174806
- Publication date Jun 2, 2022
- Samsung Electronics Co., Ltd.
- Minseok CHOI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...
- Publication number 20220113642
- Publication date Apr 14, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup KIM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEMS
- Publication number 20220104336
- Publication date Mar 31, 2022
- Samsung Electronics Co., Ltd.
- SUNGHYUP KIM
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND LITHOGRAPHY...
- Publication number 20220082946
- Publication date Mar 17, 2022
- Samsung Electronics Co., Ltd.
- Injae Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20220075271
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Sunghyup Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHIP BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20210398935
- Publication date Dec 23, 2021
- Samsung Electronics Co., Ltd.
- Junhyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROPLET GENERATOR AND EXTREME ULTRAVIOLET EXPOSURE DEVICE INCLUDING...
- Publication number 20210153332
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- Injae LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE FOR REFLECTIVE MASK
- Publication number 20210116802
- Publication date Apr 22, 2021
- Samsung Electronics Co., Ltd.
- Jinhwan LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BONDING HEAD, DIE BONDING APPARATUS INCLUDING THE SAME AND METHOD O...
- Publication number 20210098415
- Publication date Apr 1, 2021
- Samsung Electronics Co., Ltd.
- Jonggu LEE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210074558
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Sang Ki NAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHIP BONDING APPARATUS INCLUDING HEAD HAVING THERMALL...
- Publication number 20210069811
- Publication date Mar 11, 2021
- Samsung Electronics Co., Ltd.
- Sebin CHOI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...
- Publication number 20210059035
- Publication date Feb 25, 2021
- Samsung Electronics Co., Ltd.
- Sunghyup KIM
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
WAFER POLISHING PAD AND METHOD OF WAFER POLISHING USING THE SAME
- Publication number 20190193238
- Publication date Jun 27, 2019
- Samsung Electronics Co., Ltd.
- Seok Ryul Kim
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180122845
- Publication date May 3, 2018
- Samsung Electronics Co., Ltd.
- Jun Hyung KIM
- H01 - BASIC ELECTRIC ELEMENTS

SungHyup KIM

Person

Patents Grantslast 30 patents

Plasma treatment apparatus, a method of monitoring a process of man...

Target debris collection device and extreme ultraviolet light sourc...

Method of manufacturing a semiconductor package

Chip bonding apparatus and method of manufacturing semiconductor de...

Apparatus for generating extreme ultraviolet light and lithography...

Droplet accelerating assembly and extreme ultra-violet lithography...

Collector mirror and apparatus for creating extreme ultraviolet lig...

Bonding head including a thermal compensator, die bonding apparatus...

Semiconductor chip bonding apparatus including head having thermall...

Target debris collection device and extreme ultraviolet light sourc...

Substrate processing apparatus

Pellicle for reflective mask

Extreme ultraviolet light source system

Extreme ultraviolet light source systems

Target debris collection device and extreme ultraviolet light sourc...

Ring assembly and chuck assembly having the same

Substrate bonding apparatus having adsorption sectors with differen...

Patents Applicationslast 30 patents

TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME

GAS MIXING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME,...

ROBOT BLADE

SOURCE GAS NOZZLE AND SEMICONDUCTOR WAFER PROCESSING APPARATUS INCL...

SOURCE VESSEL FOR EUV

SUBSTRATE PROCESSING APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

APPARATUS FOR HEATING WAFER

PIPE BLOCKAGE PREDICTION METHODS

METHOD OF MANUFACTURING A SEMICONDUCTOR PACKAGE

WAFER CHUCK TABLE AND WAFER CHUCK SYSTEM

APPARATUS AND METHOD FOR CONTROLLING CHUCKING FORCE

TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...

COLLECTOR MIRROR AND APPARATUS FOR CREATING EXTREME ULTRAVIOLET LIG...

DEPOSITION APPARATUS

PLASMA TREATMENT APPARATUS, A METHOD OF MONITORING A PROCESS OF MAN...

DROPLET ACCELERATING ASSEMBLY AND EXTREME ULTRA-VIOLET LITHOGRAPHY...

TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEMS

APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND LITHOGRAPHY...

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

CHIP BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

DROPLET GENERATOR AND EXTREME ULTRAVIOLET EXPOSURE DEVICE INCLUDING...

PELLICLE FOR REFLECTIVE MASK

BONDING HEAD, DIE BONDING APPARATUS INCLUDING THE SAME AND METHOD O...

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR CHIP BONDING APPARATUS INCLUDING HEAD HAVING THERMALL...

TARGET DEBRIS COLLECTION DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURC...

WAFER POLISHING PAD AND METHOD OF WAFER POLISHING USING THE SAME

SUBSTRATE BONDING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...