Sungjae Lee

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TOKYO, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate analysis method and substrate analyzer
- Patent number 11,422,071
- Issue date Aug 23, 2022
- IAS, INC
- Katsuhiko Kawabata
- G01 - MEASURING TESTING
Information Patent Grant
Substrate analysis nozzle and method for analyzing substrate
- Patent number 10,688,485
- Issue date Jun 23, 2020
- IAS, INC
- Katsuhiko Kawabata
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate etching apparatus and substrate analysis method
- Patent number 9,741,627
- Issue date Aug 22, 2017
- IAS, INC
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE
- Publication number 20220042882
- Publication date Feb 10, 2022
- IAS, INC.
- KATSUHIKO KAWABATA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ANALYZING SILICON SUBSTRATE
- Publication number 20210118751
- Publication date Apr 22, 2021
- KIOXIA Corporation
- Jiahong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Analysis Nozzle And Method For Analyzing Substrate
- Publication number 20190358622
- Publication date Nov 28, 2019
- IAS Inc.
- Katsuhiko Kawabata
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
NOZZLE FOR SUBSTRATE ANALYSIS
- Publication number 20190013248
- Publication date Jan 10, 2019
- IAS Inc.
- Katsuhiko Kawabata
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ANALYSIS METHOD
- Publication number 20150357249
- Publication date Dec 10, 2015
- IAS Inc.
- Katsuhiko Kawabata
- H01 - BASIC ELECTRIC ELEMENTS