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Sungmin Huh
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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Extreme ultraviolet photomask
Patent number
8,216,748
Issue date
Jul 10, 2012
Samsung Electronics Co., Ltd.
Ilyong Jang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultraviolet photomask and methods and apparatuses for manuf...
Patent number
8,048,595
Issue date
Nov 1, 2011
Samsung Electronics Co., Ltd.
Ilyong Jang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photomask, method of making a photomask and photolithography method...
Patent number
7,629,087
Issue date
Dec 8, 2009
Samsung Electronics Co., Ltd.
Sungmin Huh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET PHOTOMASK
Publication number
20120009512
Publication date
Jan 12, 2012
Samsung Electronics Co., Ltd.
Ilyong JANG
B82 - NANO-TECHNOLOGY
Information
Patent Application
Extreme ultraviolet photomask and methods and apparatuses for manuf...
Publication number
20100167186
Publication date
Jul 1, 2010
Ilyong Jang
B82 - NANO-TECHNOLOGY
Information
Patent Application
Photomask, method of making a photomask and photolithography method...
Publication number
20060286460
Publication date
Dec 21, 2006
SAMSUNG ELECTRONICS CO., LTD.
Sungmin Huh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY